The study on inchworm piezoelectric actuators has become a hot spot in the application and research field of piezoelectric actuators in recent years. It has a wide application demand in the fields which have strict requirements on output accuracy, space size and antielectronmagnetic interference.
The inchworm type piezoelectric actuator is one kind of the developed new piezoelectric actuators which is able to ensure a large working stroke and achieve nano-scale accuracy at the same time. Therefore, many researchers have done a lot of work to overcome this shortcoming of piezoelectric components, so as to expand the application field of piezoelectric actuators. However, the working stroke of piezoelectric components is quite small, often only a few micrometers or tens of micrometers, which seriously limits the further application of piezoelectric actuators. Among the developed piezoelectric platforms, many of them have been applied for biological cell manipulation, atomic manipulation, micro/nano indentation, aerial photography and other systems with great application results. Up to now, researchers have developed a variety of micro/Nano driving and positioning platforms based on piezoelectric materials.
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